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Taiwan University has successfully developed a touch sensor using CMOS technology
Tsinghua University in Taiwan has made a breakthrough by successfully developing a tactile sensor that utilizes CMOS technology throughout almost all fabrication processes. This new sensor features a touch-sensitive area composed of a metal film coated with a protective layer. The top metal film works in conjunction with an underlying metal layer to form a capacitor. When a hand touches the sensor, the distance between the two metal layers decreases, causing a change in capacitance. This variation in capacitance allows the sensor to detect and interpret touch input.
To ensure compatibility with the CMOS process, the researchers used a sacrificial layer made of metal. During the etching stage, the sacrificial layer is removed along with the metal film, but the final desired metal structure is passivated beforehand to prevent it from being etched away. This approach ensures precise control over the sensor's design and performance.
The prototype was fabricated using TSMC’s 0.35 μm process, which includes a 2-layer polymer and a 4-layer metal stack. This advanced fabrication method demonstrates the feasibility of integrating tactile sensing capabilities into standard semiconductor manufacturing, opening up new possibilities for applications in robotics, wearable devices, and human-machine interfaces.