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Taiwan University has successfully developed a touch sensor using CMOS technology
Tsinghua University in Taiwan has recently made a breakthrough by developing a tactile sensor that utilizes CMOS technology throughout almost all manufacturing processes. This new sensor features a touch-sensitive area composed of a metal film coated with a protective layer, which forms a capacitor with an underlying metal layer. When touched, the distance between the two metal layers decreases, causing a change in capacitance. This variation is then used to detect and interpret touch input.
To ensure compatibility with the CMOS fabrication process, a sacrificial metal layer was employed. During the etching stage, the sacrificial layer allows for the precise removal of unwanted material while protecting the final metal structure. This approach ensures that the intended metal film remains intact and functional after processing. The prototype was fabricated using TSMC's 0.35 μm process, incorporating a 2-layer polymer and 4-layer metal stack. This development marks a significant step forward in creating high-performance, low-cost tactile sensors suitable for a wide range of applications, from robotics to wearable devices.